Surface reaction mechanism of Y2O3 atomic layer deposition on the hydroxylated Si(100)-2x1: A density functional theory study

Ren, J. / Zhou, G. / Hu, Y. et al. | British Library Online Contents | 2009

The Competitive Reactions in Atomic Layer Deposition of HfO~2, ZrO~2 and Al~2O~3 on Hydroxylated Si(100) Surfaces: A Density Functional Theory Study

Ren, J. / Zhou, G.F. | British Library Online Contents | 2011

Surface reactions in atomic layer deposition of HfO2, ZrO2 and Al2O3 on hydroxylated and sulfur-passivated GaAs(100) surfaces: A comparative study by density functional theory

Ren, J. / Zhou, G. / Hu, Y. et al. | British Library Online Contents | 2008

Surface reaction mechanism of atomic layer deposition of HfO2 on Ge(100)-2x1: A density functional theory study

Ren, J. / Lu, H. L. / Chen, W. et al. | British Library Online Contents | 2006

Density functional theory study of SO2-adsorbed Ni(111) and hydroxylated NiO(111) surface

Wei, Xin / Dong, Chaofang / Chen, Zhanghua et al. | British Library Online Contents | 2015