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Water Molecule Sensitive Layers Deposited from Hexamethyldisiloxane/Oxygen Mixture at Low Temperature
Water Molecule Sensitive Layers Deposited from Hexamethyldisiloxane/Oxygen Mixture at Low Temperature
Water Molecule Sensitive Layers Deposited from Hexamethyldisiloxane/Oxygen Mixture at Low Temperature
Guermat, N. (author) / Bellel, A. (author) / Sahli, S. (author) / Segui, Y. (author) / Raynaud, P. (author) / Gabouze, N.
2009-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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