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    An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/oxygen plasmas

    New search for: Alexander, M. R.
    New search for: Short, R. D.
    New search for: Jones, F. R.
    New search for: Stollenwerk, M.
    New search for: Zabold, J.
    New search for: Michaeli, W.

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    An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/oxygen plasmas

    New search for: Alexander, M. R.
    New search for: Short, R. D.
    New search for: Jones, F. R.
    New search for: Stollenwerk, M.
    New search for: Zabold, J.
    New search for: Michaeli, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/oxygen plasmas

    New search for: Alexander, M. R.
    New search for: Short, R. D.
    New search for: Jones, F. R.
    New search for: Stollenwerk, M.
    New search for: Zabold, J.
    New search for: Michaeli, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/oxygen plasmas

    Contributors:

    Alexander, M. R. (author) / Short, R. D. (author) / Jones, F. R. (author) / Stollenwerk, M. (author) / Zabold, J. (author) / Michaeli, W. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE ; 31 ; 1879-1885

    Publication date:

    1996-01-01

    Size:

    7 pages

    ISSN:

    0022-2461

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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