Ellipsometric study of a-Be3N2 thin films prepared by radio frequency magnetron sputtering: Fid-Bau Portal

Ellipsometric study of a-Be3N2 thin films prepared by radio frequency magnetron sputtering

Khoshman, J. M. / Jennings, W. D. / Kordesch, M. E.

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Ellipsometric study of a-Be3N2 thin films prepared by radio frequency magnetron sputtering

Khoshman, J. M. / Jennings, W. D. / Kordesch, M. E.

Ellipsometric study of a-Be3N2 thin films prepared by radio frequency magnetron sputtering

Khoshman, J. M. / Jennings, W. D. / Kordesch, M. E.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Ellipsometric study of a-Be3N2 thin films prepared by radio frequency magnetron sputtering

Contributors:

Khoshman, J. M. (author) / Jennings, W. D. (author) / Kordesch, M. E. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 6190-6194

Publication date:

2009-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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