Structural and mechanical characteristics of (103) AlN thin films prepared by radio frequency magnetron sputtering: Fid-Bau Portal

Structural and mechanical characteristics of (103) AlN thin films prepared by radio frequency magnetron sputtering

Yang, P. F. / Jian, S. R. / Wu, S. / Lai, Y. S. / Wang, C. T. / Chen, R. S.

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Structural and mechanical characteristics of (103) AlN thin films prepared by radio frequency magnetron sputtering

Yang, P. F. / Jian, S. R. / Wu, S. / Lai, Y. S. / Wang, C. T. / Chen, R. S.

Structural and mechanical characteristics of (103) AlN thin films prepared by radio frequency magnetron sputtering

Yang, P. F. / Jian, S. R. / Wu, S. / Lai, Y. S. / Wang, C. T. / Chen, R. S.

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Document information

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Document information

Title:

Structural and mechanical characteristics of (103) AlN thin films prepared by radio frequency magnetron sputtering

Contributors:

Yang, P. F. (author) / Jian, S. R. (author) / Wu, S. (author) / Lai, Y. S. (author) / Wang, C. T. (author) / Chen, R. S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 5984-5988

Publication date:

2009-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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