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Evaluation of local strain in Si using UV-Raman spectroscopy
Evaluation of local strain in Si using UV-Raman spectroscopy
Evaluation of local strain in Si using UV-Raman spectroscopy
Ogura, A. (author) / Kosemura, D. (author) / Takei, M. (author) / Uchida, H. (author) / Hattori, N. (author) / Yoshimaru, M. (author) / Mayuzumi, S. (author) / Wakabayashi, H. (author)
MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 159-160 ; 206-211
2009-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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