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Experimental challenges for approaching local strain determination in silicon by nano-Raman spectroscopy

Zhu, L. / Atesang, J. / Dudek, P. / Hecker, M. / Rinderknecht, J. / Ritz, Y. / Geisler, H. / Herr, U. / Geer, R. / Zschech, E.

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Experimental challenges for approaching local strain determination in silicon by nano-Raman spectroscopy

Zhu, L. / Atesang, J. / Dudek, P. / Hecker, M. / Rinderknecht, J. / Ritz, Y. / Geisler, H. / Herr, U. / Geer, R. / Zschech, E.

Experimental challenges for approaching local strain determination in silicon by nano-Raman spectroscopy

Zhu, L. / Atesang, J. / Dudek, P. / Hecker, M. / Rinderknecht, J. / Ritz, Y. / Geisler, H. / Herr, U. / Geer, R. / Zschech, E.

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Document information

Title:

Experimental challenges for approaching local strain determination in silicon by nano-Raman spectroscopy

Contributors:

Zhu, L. (author) / Atesang, J. (author) / Dudek, P. (author) / Hecker, M. (author) / Rinderknecht, J. (author) / Ritz, Y. (author) / Geisler, H. (author) / Herr, U. (author) / Geer, R. (author) / Zschech, E. (author)

Published in:

MATERIALS SCIENCE -WROCLAW- ; 25 ; 19-32

Publication date:

2007-01-01

Size:

14 pages

ISSN:

0137-1339

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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