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Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion

Hazdra, P. / Komarnitskyy, V. / Bursikova, V.

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Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion

Hazdra, P. / Komarnitskyy, V. / Bursikova, V.

Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion

Hazdra, P. / Komarnitskyy, V. / Bursikova, V.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion

Contributors:

Hazdra, P. (author) / Komarnitskyy, V. (author) / Bursikova, V. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 159-160 ; 342-345

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Enhanced Diffusion in Silicon Processing

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