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    Thermal annealing of SiC thin films with varying stoichiometry

    New search for: Kuenle, M.
    New search for: Janz, S.
    New search for: Eibl, O.
    New search for: Berthold, C.
    New search for: Presser, V.
    New search for: Nickel, K. G.

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    Thermal annealing of SiC thin films with varying stoichiometry

    New search for: Kuenle, M.
    New search for: Janz, S.
    New search for: Eibl, O.
    New search for: Berthold, C.
    New search for: Presser, V.
    New search for: Nickel, K. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Thermal annealing of SiC thin films with varying stoichiometry

    New search for: Kuenle, M.
    New search for: Janz, S.
    New search for: Eibl, O.
    New search for: Berthold, C.
    New search for: Presser, V.
    New search for: Nickel, K. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Thermal annealing of SiC thin films with varying stoichiometry

    Contributors:

    Kuenle, M. (author) / Janz, S. (author) / Eibl, O. (author) / Berthold, C. (author) / Presser, V. (author) / Nickel, K. G. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 159-160 ; 355-360

    Publication date:

    2009-01-01

    Size:

    6 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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