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Effects of substrate temperature and Zn addition on the properties of Al-doped ZnO films prepared by magnetron sputtering
Effects of substrate temperature and Zn addition on the properties of Al-doped ZnO films prepared by magnetron sputtering
Effects of substrate temperature and Zn addition on the properties of Al-doped ZnO films prepared by magnetron sputtering
Kim, Y. H. (author) / Lee, K. S. (author) / Lee, T. S. (author) / Cheong, B. (author) / Seong, T. Y. (author) / Kim, W. M. (author)
APPLIED SURFACE SCIENCE ; 255 ; 7251-7256
2009-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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