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SLM-based maskless lithography for TFT-LCD

Kim, K. R. / Yi, J. / Cho, S. H. / Kang, N. H. / Cho, M. W. / Shin, B. S. / Choi, B.

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SLM-based maskless lithography for TFT-LCD

Kim, K. R. / Yi, J. / Cho, S. H. / Kang, N. H. / Cho, M. W. / Shin, B. S. / Choi, B.

SLM-based maskless lithography for TFT-LCD

Kim, K. R. / Yi, J. / Cho, S. H. / Kang, N. H. / Cho, M. W. / Shin, B. S. / Choi, B.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

SLM-based maskless lithography for TFT-LCD

Contributors:

Kim, K. R. (author) / Yi, J. (author) / Cho, S. H. (author) / Kang, N. H. (author) / Cho, M. W. (author) / Shin, B. S. (author) / Choi, B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 7835-7840

Publication date:

2009-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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