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Effect of hydrogen doping in ZnO thin films by pulsed DC magnetron sputtering

Park, Y. R. / Kim, J. / Kim, Y. S.

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Effect of hydrogen doping in ZnO thin films by pulsed DC magnetron sputtering

Park, Y. R. / Kim, J. / Kim, Y. S.

Effect of hydrogen doping in ZnO thin films by pulsed DC magnetron sputtering

Park, Y. R. / Kim, J. / Kim, Y. S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effect of hydrogen doping in ZnO thin films by pulsed DC magnetron sputtering

Contributors:

Park, Y. R. (author) / Kim, J. (author) / Kim, Y. S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 9010-9014

Publication date:

2009-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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