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Particles detection and analysis of hard disk substrate after cleaning of post chemical mechanical polishing

Huang, Y. / Lu, X. / Pan, G. / Lee, B. / Luo, J.

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Particles detection and analysis of hard disk substrate after cleaning of post chemical mechanical polishing

Huang, Y. / Lu, X. / Pan, G. / Lee, B. / Luo, J.

Particles detection and analysis of hard disk substrate after cleaning of post chemical mechanical polishing

Huang, Y. / Lu, X. / Pan, G. / Lee, B. / Luo, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Particles detection and analysis of hard disk substrate after cleaning of post chemical mechanical polishing

Contributors:

Huang, Y. (author) / Lu, X. (author) / Pan, G. (author) / Lee, B. (author) / Luo, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 9100-9104

Publication date:

2009-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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