Chemical Mechanical Polishing of Computer Hard Disk Substrate in Colloidal SiO~2 Slurry

Lei, H. | British Library Online Contents | 2002

Post cleaning of chemical mechanical polishing process

Liu, C.-W. / Dai, B.-T. / Yeh, C.-F. | British Library Online Contents | 1996

Effect of pH on Hard Disk Substrate Polishing in Glycine-Hydrogen Peroxide System Abrasive-Free Slurry

Chen, S.S. / Lei, H. / Chen, R.L. | British Library Online Contents | 2013

Cu (II) as a Catalyst for Hydrogen Peroxide System Abrasive-Free Polishing on Hard Disk Substrate

Wang, Z.J. / Lei, H. / Zhang, W.T. et al. | British Library Online Contents | 2013

Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate

Zhang, Z. / Liu, W. / Zhu, J. et al. | British Library Online Contents | 2010