Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate: Fid-Bau Portal

Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate

Zhang, Z. / Liu, W. / Zhu, J. / Song, Z.

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Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate

Zhang, Z. / Liu, W. / Zhu, J. / Song, Z.

Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate

Zhang, Z. / Liu, W. / Zhu, J. / Song, Z.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate

Contributors:

Zhang, Z. (author) / Liu, W. (author) / Zhu, J. (author) / Song, Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 1750-1755

Publication date:

2010-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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