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Spectroscopic ellipsometry of very thin tantalum pentoxide on Si

Karmakov, I. / Konova, A. / Atanassova, E. / Paskaleva, A.

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Spectroscopic ellipsometry of very thin tantalum pentoxide on Si

Karmakov, I. / Konova, A. / Atanassova, E. / Paskaleva, A.

Spectroscopic ellipsometry of very thin tantalum pentoxide on Si

Karmakov, I. / Konova, A. / Atanassova, E. / Paskaleva, A.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Spectroscopic ellipsometry of very thin tantalum pentoxide on Si

Contributors:

Karmakov, I. (author) / Konova, A. (author) / Atanassova, E. (author) / Paskaleva, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 9211-9216

Publication date:

2009-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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