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    Study on Grinding Performance of Soft Abrasive Wheel for Silicon Wafer

    New search for: Kang, R.K.
    New search for: Gao, S.
    New search for: Jin, Z.J.
    New search for: Guo, D.M.
    New search for: Zhao, B.
    New search for: Xu, X.
    New search for: Cai, G.
    New search for: Kang, R.

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    Study on Grinding Performance of Soft Abrasive Wheel for Silicon Wafer

    New search for: Kang, R.K.
    New search for: Gao, S.
    New search for: Jin, Z.J.
    New search for: Guo, D.M.
    New search for: Zhao, B.
    New search for: Xu, X.
    New search for: Cai, G.
    New search for: Kang, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Study on Grinding Performance of Soft Abrasive Wheel for Silicon Wafer

    New search for: Kang, R.K.
    New search for: Gao, S.
    New search for: Jin, Z.J.
    New search for: Guo, D.M.
    New search for: Zhao, B.
    New search for: Xu, X.
    New search for: Cai, G.
    New search for: Kang, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Study on Grinding Performance of Soft Abrasive Wheel for Silicon Wafer

    Contributors:

    Kang, R.K. (author) / Gao, S. (author) / Jin, Z.J. (author) / Guo, D.M. (author) / Zhao, B. / Xu, X. / Cai, G. / Kang, R.

    Published in:

    Advances in Grinding and Abrasive Technology XV ; 529-534

    KEY ENGINEERING MATERIALS ; 416

    Publication date:

    2009-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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