Tribological reliability of MEMS multilayered thin films: Fid-Bau Portal

Tribological reliability of MEMS multilayered thin films

Trinkle, S. / Al-Haik, M. / Sumali, H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Tribological reliability of MEMS multilayered thin films

Trinkle, S. / Al-Haik, M. / Sumali, H.

Tribological reliability of MEMS multilayered thin films

Trinkle, S. / Al-Haik, M. / Sumali, H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Tribological reliability of MEMS multilayered thin films

Contributors:

Trinkle, S. (author) / Al-Haik, M. (author) / Sumali, H. (author) / Taha, M.R. / Al-Haik, M.

Published in:

NANOTECHNOLOGY FOR STRUCTURAL MATERIALS ; 201-216

INTERNATIONAL JOURNAL OF MATERIALS AND STRUCTURAL INTEGRITY ; 3

Publication date:

2009-01-01

Size:

16 pages

ISSN:

1745-0055

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.112

Trinkle, Shane / Al-Haik, Marwan / Sumali, Hartono | British Library Online Contents | 2009

Tribological characteristics of composite multilayered coatings

Ovchinnikov, E. V. / Leshchik, S. D. / Struk, V. A. et al. | British Library Online Contents | 2000

Stresses in Multilayered Thin Films

Cammarata, R. C. / Bilello, J. C. / Greer, A. L. et al. | British Library Online Contents | 1999

Tribological Coatings for LIGA MEMS

Prasad, S. / Christenson, T. / Dugger, M. | British Library Online Contents | 2002

Tribological characteristics of multilayered composite titanium - diamond-like coatings

Tsuan, Y. / Chizhik, S. A. / Popov, A. N. et al. | British Library Online Contents | 2005