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Optical investigation of stacking faults in 4H-SiC epitaxial layers: Comparison of 3C and 8H polytypes
Optical investigation of stacking faults in 4H-SiC epitaxial layers: Comparison of 3C and 8H polytypes
Optical investigation of stacking faults in 4H-SiC epitaxial layers: Comparison of 3C and 8H polytypes
Juillaguet, S. (author) / Robert, T. (author) / Camassel, J. (author)
2009-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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