SEM Visibility of Stacking Faults in 4H-Silicon Carbide Epitaxial and Implanted Layers: Fid-Bau Portal

SEM Visibility of Stacking Faults in 4H-Silicon Carbide Epitaxial and Implanted Layers

Zimmermann, U. / Osterman, J. / Galeckas, A. / Hallen, A.

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SEM Visibility of Stacking Faults in 4H-Silicon Carbide Epitaxial and Implanted Layers

Zimmermann, U. / Osterman, J. / Galeckas, A. / Hallen, A.

SEM Visibility of Stacking Faults in 4H-Silicon Carbide Epitaxial and Implanted Layers

Zimmermann, U. / Osterman, J. / Galeckas, A. / Hallen, A.

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Title:

SEM Visibility of Stacking Faults in 4H-Silicon Carbide Epitaxial and Implanted Layers

Contributors:

Zimmermann, U. (author) / Osterman, J. (author) / Galeckas, A. (author) / Hallen, A. (author) / Bergman, P. / Janzen, E.

Published in:

Silicon Carbide and Related Materials 2002 ; 937-940

MATERIALS SCIENCE FORUM ; 433/436

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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