Optical Investigation of Stacking Faults and Micro-Crystalline Inclusions In-Low-Doped 4H-SiC Layers: Fid-Bau Portal

Optical Investigation of Stacking Faults and Micro-Crystalline Inclusions In-Low-Doped 4H-SiC Layers

Juillaguet, S. / Balloud, C. / Pernot, J. / Sartel, C. / Souliere, V. / Camassel, J. / Monteil, Y.

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Optical Investigation of Stacking Faults and Micro-Crystalline Inclusions In-Low-Doped 4H-SiC Layers

Juillaguet, S. / Balloud, C. / Pernot, J. / Sartel, C. / Souliere, V. / Camassel, J. / Monteil, Y.

Optical Investigation of Stacking Faults and Micro-Crystalline Inclusions In-Low-Doped 4H-SiC Layers

Juillaguet, S. / Balloud, C. / Pernot, J. / Sartel, C. / Souliere, V. / Camassel, J. / Monteil, Y.

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Title:

Optical Investigation of Stacking Faults and Micro-Crystalline Inclusions In-Low-Doped 4H-SiC Layers

Contributors:

Juillaguet, S. (author) / Balloud, C. (author) / Pernot, J. (author) / Sartel, C. (author) / Souliere, V. (author) / Camassel, J. (author) / Monteil, Y. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 577-580

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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