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Dynamical behavior of methylchloride on GaAs(001)
Dynamical behavior of methylchloride on GaAs(001)
Dynamical behavior of methylchloride on GaAs(001)
Ozeki, M. (author) / Tomikawa, M. (author) / Onitsuka, N. (author)
2009-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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Etching reaction of methylchloride molecule on the GaAs (001)-2x4 surface
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