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Study of the surface cleaning of GOI and SGOI substrates for Ge epitaxial growth

Moriyama, Y. / Hirashita, N. / Usuda, K. / Nakaharai, S. / Sugiyama, N. / Toyoda, E. / Takagi, S. i.

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Study of the surface cleaning of GOI and SGOI substrates for Ge epitaxial growth

Moriyama, Y. / Hirashita, N. / Usuda, K. / Nakaharai, S. / Sugiyama, N. / Toyoda, E. / Takagi, S. i.

Study of the surface cleaning of GOI and SGOI substrates for Ge epitaxial growth

Moriyama, Y. / Hirashita, N. / Usuda, K. / Nakaharai, S. / Sugiyama, N. / Toyoda, E. / Takagi, S. i.

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Order at Subito €

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Document information

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Document information

Title:

Study of the surface cleaning of GOI and SGOI substrates for Ge epitaxial growth

Contributors:

Moriyama, Y. (author) / Hirashita, N. (author) / Usuda, K. (author) / Nakaharai, S. (author) / Sugiyama, N. (author) / Toyoda, E. (author) / Takagi, S. i. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 823-829

Publication date:

2009-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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