Residual Strains in a Nanometer Thick Cr Film Measured on Micromachined Beams: Fid-Bau Portal

Residual Strains in a Nanometer Thick Cr Film Measured on Micromachined Beams

Zhou, Z.M. / Zhou, Y. / Cao, Y. / Mao, H.

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Residual Strains in a Nanometer Thick Cr Film Measured on Micromachined Beams

Zhou, Z.M. / Zhou, Y. / Cao, Y. / Mao, H.

Residual Strains in a Nanometer Thick Cr Film Measured on Micromachined Beams

Zhou, Z.M. / Zhou, Y. / Cao, Y. / Mao, H.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Residual Strains in a Nanometer Thick Cr Film Measured on Micromachined Beams

Contributors:

Zhou, Z.M. (author) / Zhou, Y. (author) / Cao, Y. (author) / Mao, H. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SHENYANG- ; 25 ; 77-80

Publication date:

2009-01-01

Size:

4 pages

ISSN:

1005-0302

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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