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    Epitaxial anatase HfO~2 on high-mobility substrate for ultra-scaled CMOS devices

    New search for: Debernardi, A.
    New search for: Wiemer, C.
    New search for: Fanciulli, M.

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    Epitaxial anatase HfO~2 on high-mobility substrate for ultra-scaled CMOS devices

    New search for: Debernardi, A.
    New search for: Wiemer, C.
    New search for: Fanciulli, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Epitaxial anatase HfO~2 on high-mobility substrate for ultra-scaled CMOS devices

    New search for: Debernardi, A.
    New search for: Wiemer, C.
    New search for: Fanciulli, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Epitaxial anatase HfO~2 on high-mobility substrate for ultra-scaled CMOS devices

    Contributors:

    Debernardi, A. (author) / Wiemer, C. (author) / Fanciulli, M. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 11 ; 241-244

    Publication date:

    2008-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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