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    Sputter-Deposited ZrO~2 Gate Dielectric on High Mobility Epitaxial-GaAs/Ge Channel Material for Advanced CMOS Applications

    New search for: Dalapati, G.K.
    New search for: Kumar, A.
    New search for: Wong, A.S.W.
    New search for: Kumar, M.K.
    New search for: Chia, C.K.
    New search for: Ho, G.W.
    New search for: Chi, D.Z.
    New search for: Wang, J.
    New search for: Mathew, P.
    New search for: Li, X.
    New search for: Huang, C.
    New search for: Zhu, H.

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    Sputter-Deposited ZrO~2 Gate Dielectric on High Mobility Epitaxial-GaAs/Ge Channel Material for Advanced CMOS Applications

    New search for: Dalapati, G.K.
    New search for: Kumar, A.
    New search for: Wong, A.S.W.
    New search for: Kumar, M.K.
    New search for: Chia, C.K.
    New search for: Ho, G.W.
    New search for: Chi, D.Z.
    New search for: Wang, J.
    New search for: Mathew, P.
    New search for: Li, X.
    New search for: Huang, C.
    New search for: Zhu, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Sputter-Deposited ZrO~2 Gate Dielectric on High Mobility Epitaxial-GaAs/Ge Channel Material for Advanced CMOS Applications

    New search for: Dalapati, G.K.
    New search for: Kumar, A.
    New search for: Wong, A.S.W.
    New search for: Kumar, M.K.
    New search for: Chia, C.K.
    New search for: Ho, G.W.
    New search for: Chi, D.Z.
    New search for: Wang, J.
    New search for: Mathew, P.
    New search for: Li, X.
    New search for: Huang, C.
    New search for: Zhu, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Sputter-Deposited ZrO~2 Gate Dielectric on High Mobility Epitaxial-GaAs/Ge Channel Material for Advanced CMOS Applications

    Contributors:

    Dalapati, G.K. (author) / Kumar, A. (author) / Wong, A.S.W. (author) / Kumar, M.K. (author) / Chia, C.K. (author) / Ho, G.W. (author) / Chi, D.Z. (author) / Wang, J. / Mathew, P. / Li, X.

    Published in:

    Advances in Materials Processing IX ; 504-509

    KEY ENGINEERING MATERIALS ; 443

    Publication date:

    2010-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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