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Vertical Transistor with Ultrathin Silicon Nitride Gate Dielectric

Moradi, M. / Nathan, A. / Haverinen, H. M. / Jabbour, G. E.

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Vertical Transistor with Ultrathin Silicon Nitride Gate Dielectric

Moradi, M. / Nathan, A. / Haverinen, H. M. / Jabbour, G. E.

Vertical Transistor with Ultrathin Silicon Nitride Gate Dielectric

Moradi, M. / Nathan, A. / Haverinen, H. M. / Jabbour, G. E.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Vertical Transistor with Ultrathin Silicon Nitride Gate Dielectric

Contributors:

Moradi, M. (author) / Nathan, A. (author) / Haverinen, H. M. (author) / Jabbour, G. E. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 21 ; 4505-4510

Publication date:

2009-01-01

Size:

6 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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