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Surface characterization of plasma-modified resist patterns by ToF-SIMS analysis

Park, J. S. / Kim, H. j.

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Surface characterization of plasma-modified resist patterns by ToF-SIMS analysis

Park, J. S. / Kim, H. j.

Surface characterization of plasma-modified resist patterns by ToF-SIMS analysis

Park, J. S. / Kim, H. j.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

Similar titles

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Document information

Title:

Surface characterization of plasma-modified resist patterns by ToF-SIMS analysis

Contributors:

Park, J. S. (author) / Kim, H. j. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 1604-1608

Publication date:

2009-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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