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Characterization of Si-added aluminum oxide (AlSiO) films for power devices

Komatsu, N. / Masumoto, K. / Aoki, H. / Kimura, C. / Sugino, T.

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Characterization of Si-added aluminum oxide (AlSiO) films for power devices

Komatsu, N. / Masumoto, K. / Aoki, H. / Kimura, C. / Sugino, T.

Characterization of Si-added aluminum oxide (AlSiO) films for power devices

Komatsu, N. / Masumoto, K. / Aoki, H. / Kimura, C. / Sugino, T.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Characterization of Si-added aluminum oxide (AlSiO) films for power devices

Contributors:

Komatsu, N. (author) / Masumoto, K. (author) / Aoki, H. (author) / Kimura, C. (author) / Sugino, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 1803-1806

Publication date:

2010-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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