Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Microstructure of microwave dielectricthin films by RF magnetron sputtering

    New search for: Shi, F.
    New search for: Cui, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Microstructure of microwave dielectricthin films by RF magnetron sputtering

    New search for: Shi, F.
    New search for: Cui, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Microstructure of microwave dielectricthin films by RF magnetron sputtering

    New search for: Shi, F.
    New search for: Cui, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Microstructure of microwave dielectricthin films by RF magnetron sputtering

    Contributors:

    Shi, F. (author) / Cui, C. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 256 ; 2626-2629

    Publication date:

    2010-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Microstructure and Properties of TiSiN-Ag Films Deposited by Magnetron Sputtering

    Guan, Bin / Xu, Jun-hua | British Library Online Contents | 2018

    Microstructure of TiC/a-C Multilayered Films Prepared by Unbalanced Magnetron Sputtering

    Xiao, X.-l. / Hong, R.-j. / Li, H.-w. et al. | British Library Online Contents | 2008

    Composition and Microstructure of Magnetron Sputtering Deposited Ti-containing Amorphous Carbon Films

    Du, J. / Zhang, P. | British Library Online Contents | 2007

    Effects of sputtering pressure on microstructure and mechanical properties of ZrN films deposited by magnetron sputtering

    Lin, Shaochen / Zhang, Jian / Zhu, Ruihua et al. | British Library Online Contents | 2018

    Optical characterization and microstructure of BaTiO3 thin films obtained by RF-magnetron sputtering

    Ianculescu, A. / Gartner, M. / Despax, B. et al. | British Library Online Contents | 2006

    Back to top