Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Effects of sputtering pressure on microstructure and mechanical properties of ZrN films deposited by magnetron sputtering

    New search for: Lin, Shaochen
    New search for: Zhang, Jian
    New search for: Zhu, Ruihua
    New search for: Fu, Shangchao
    New search for: Yun, Daqin

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Effects of sputtering pressure on microstructure and mechanical properties of ZrN films deposited by magnetron sputtering

    New search for: Lin, Shaochen
    New search for: Zhang, Jian
    New search for: Zhu, Ruihua
    New search for: Fu, Shangchao
    New search for: Yun, Daqin

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effects of sputtering pressure on microstructure and mechanical properties of ZrN films deposited by magnetron sputtering

    New search for: Lin, Shaochen
    New search for: Zhang, Jian
    New search for: Zhu, Ruihua
    New search for: Fu, Shangchao
    New search for: Yun, Daqin

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effects of sputtering pressure on microstructure and mechanical properties of ZrN films deposited by magnetron sputtering

    Contributors:

    Lin, Shaochen (author) / Zhang, Jian (author) / Zhu, Ruihua (author) / Fu, Shangchao (author) / Yun, Daqin (author)

    Published in:

    Materials research bulletin ; 105 ; 231-236

    Publication date:

    2018-01-01

    Size:

    6 pages

    ISSN:

    0025-5408

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Effects of sputtering power on mechanical properties of Cr films deposited by magnetron sputtering

    Kim, K. / Park, M. / Lee, W. et al. | British Library Online Contents | 2008

    Microstructure and Properties of TiSiN-Ag Films Deposited by Magnetron Sputtering

    Guan, Bin / Xu, Jun-hua | British Library Online Contents | 2018

    Microstructure, mechanical and tribological properties of TiMoN/Si3N4 nano-multilayer films deposited by magnetron sputtering

    Wang, T. / Zhang, G. / Jiang, B. | British Library Online Contents | 2015

    Microstructure and optical properties of SiCN thin films deposited by reactive magnetron sputtering

    Peng, Y. / Zhou, J. / Gong, J. et al. | British Library Online Contents | 2014

    Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

    Broitman, E. / Hellgren, N. / Wanstrand, O. et al. | British Library Online Contents | 2001

    Back to top