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    Influence of radiofrequency power on compositional, structural and optical properties of amorphous silicon carbonitride films

    New search for: Peng, Y.
    New search for: Zhou, J.
    New search for: Zhang, Z.
    New search for: Zhao, B.
    New search for: Tan, X.

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    Influence of radiofrequency power on compositional, structural and optical properties of amorphous silicon carbonitride films

    New search for: Peng, Y.
    New search for: Zhou, J.
    New search for: Zhang, Z.
    New search for: Zhao, B.
    New search for: Tan, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of radiofrequency power on compositional, structural and optical properties of amorphous silicon carbonitride films

    New search for: Peng, Y.
    New search for: Zhou, J.
    New search for: Zhang, Z.
    New search for: Zhao, B.
    New search for: Tan, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Influence of radiofrequency power on compositional, structural and optical properties of amorphous silicon carbonitride films

    Contributors:

    Peng, Y. (author) / Zhou, J. (author) / Zhang, Z. (author) / Zhao, B. (author) / Tan, X. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 256 ; 2189-2192

    Publication date:

    2010-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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