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    Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures

    New search for: Ctvrtlik, R.
    New search for: Al-Haik, M. S.
    New search for: Kulikovsky, V.

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    Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures

    New search for: Ctvrtlik, R.
    New search for: Al-Haik, M. S.
    New search for: Kulikovsky, V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures

    New search for: Ctvrtlik, R.
    New search for: Al-Haik, M. S.
    New search for: Kulikovsky, V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures

    Contributors:

    Ctvrtlik, R. (author) / Al-Haik, M. S. (author) / Kulikovsky, V. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE ; 50 ; 1553-1564

    Publication date:

    2015-01-01

    Size:

    12 pages

    ISSN:

    0022-2461

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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