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    Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD

    New search for: Vassallo, E.
    New search for: Cremona, A.
    New search for: Ghezzi, F.
    New search for: Dellera, F.
    New search for: Laguardia, L.
    New search for: Ambrosone, G.
    New search for: Coscia, U.

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    Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD

    New search for: Vassallo, E.
    New search for: Cremona, A.
    New search for: Ghezzi, F.
    New search for: Dellera, F.
    New search for: Laguardia, L.
    New search for: Ambrosone, G.
    New search for: Coscia, U.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD

    New search for: Vassallo, E.
    New search for: Cremona, A.
    New search for: Ghezzi, F.
    New search for: Dellera, F.
    New search for: Laguardia, L.
    New search for: Ambrosone, G.
    New search for: Coscia, U.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD

    Contributors:

    Vassallo, E. (author) / Cremona, A. (author) / Ghezzi, F. (author) / Dellera, F. (author) / Laguardia, L. (author) / Ambrosone, G. (author) / Coscia, U. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 252 ; 7993-8000

    Publication date:

    2006-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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