Reactive Pulsed Laser Deposition of titanium nitride thin film: Optimization of process parameters using Secondary Ion Mass Spectrometry: Fid-Bau Portal

Reactive Pulsed Laser Deposition of titanium nitride thin film: Optimization of process parameters using Secondary Ion Mass Spectrometry

Krishnan, R. / Mathews, T. / Balamurugan, A. K. / Dash, S. / Tyagi, A. K. / Raj, B. / Jayaram, V.

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Reactive Pulsed Laser Deposition of titanium nitride thin film: Optimization of process parameters using Secondary Ion Mass Spectrometry

Krishnan, R. / Mathews, T. / Balamurugan, A. K. / Dash, S. / Tyagi, A. K. / Raj, B. / Jayaram, V.

Reactive Pulsed Laser Deposition of titanium nitride thin film: Optimization of process parameters using Secondary Ion Mass Spectrometry

Krishnan, R. / Mathews, T. / Balamurugan, A. K. / Dash, S. / Tyagi, A. K. / Raj, B. / Jayaram, V.

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Document information

Title:

Reactive Pulsed Laser Deposition of titanium nitride thin film: Optimization of process parameters using Secondary Ion Mass Spectrometry

Contributors:

Krishnan, R. (author) / Mathews, T. (author) / Balamurugan, A. K. (author) / Dash, S. (author) / Tyagi, A. K. (author) / Raj, B. (author) / Jayaram, V. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 3077-3080

Publication date:

2010-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Caricato, A. P. / Fernandez, M. / Leggieri, G. et al. | British Library Online Contents | 2007

Titanium nitride thin film deposition by laser CVD

Reisse, G. / Ebert, R. | British Library Online Contents | 1996

RF plasma reactive pulsed laser deposition of boron nitride thin films

Mitu, B. / Bilkova, P. / Marotta, V. et al. | British Library Online Contents | 2005

Copper nitride films produced by reactive pulsed laser deposition

Soto, G. / Diaz, J. A. / de la Cruz, W. | British Library Online Contents | 2003

Pulsed laser deposition of titanium nitride films on sapphire

Talyansky, V. / Choopun, S. / Downes, M. J. et al. | British Library Online Contents | 1999