Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Morphological investigation of aluminium nitride films on various substrates for MEMS applications

    New search for: Kar, J.P.
    New search for: Bose, G.
    New search for: Tuli, S.
    New search for: Myoung, J.M.
    New search for: Mukherjee, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Morphological investigation of aluminium nitride films on various substrates for MEMS applications

    New search for: Kar, J.P.
    New search for: Bose, G.
    New search for: Tuli, S.
    New search for: Myoung, J.M.
    New search for: Mukherjee, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Morphological investigation of aluminium nitride films on various substrates for MEMS applications

    New search for: Kar, J.P.
    New search for: Bose, G.
    New search for: Tuli, S.
    New search for: Myoung, J.M.
    New search for: Mukherjee, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Morphological investigation of aluminium nitride films on various substrates for MEMS applications

    Contributors:

    Kar, J.P. (author) / Bose, G. (author) / Tuli, S. (author) / Myoung, J.M. (author) / Mukherjee, S. (author)

    Published in:

    SURFACE ENGINEERING -LONDON- ; 25 ; 526-530

    Publication date:

    2009-01-01

    Size:

    5 pages

    ISSN:

    0267-0844

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Oxidation of aluminium nitride substrates

    Robinson, D. / Dieckmann, R. | British Library Online Contents | 1994

    Oxide film formation on aluminium nitride substrates covered with thin aluminium layers

    Robinson, D. A. / Yin, G. / Dieckmann, R. | British Library Online Contents | 1994

    Thermal Transport Properties of Various Thin Films for MEMS Applications

    Choi, S. R. / Kim, D. S. / Choa, S. H. | British Library Online Contents | 2006

    Alternative substrates for gallium nitride epitaxy: photoluminescence and morphological investigations

    Middleton, P. G. / Trager-Cowan, C. / O'Donnell, K. P. et al. | British Library Online Contents | 1997

    Surface oxidation of aluminium nitride thin films

    Watanabe, Y. / Hara, Y. / Tokuda, T. et al. | British Library Online Contents | 2000

    Back to top