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Thermal Transport Properties of Various Thin Films for MEMS Applications
Thermal Transport Properties of Various Thin Films for MEMS Applications
Thermal Transport Properties of Various Thin Films for MEMS Applications
Choi, S. R. (author) / Kim, D. S. (author) / Choa, S. H. (author) / Lee, S.-B. / Kim, Y.-J.
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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