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CL/EBIC-SEM Techniques for Evaluation of Impact of Crystallographic Defects on Carrier Lifetime in 4H-SiC Epitaxial Layers
CL/EBIC-SEM Techniques for Evaluation of Impact of Crystallographic Defects on Carrier Lifetime in 4H-SiC Epitaxial Layers
CL/EBIC-SEM Techniques for Evaluation of Impact of Crystallographic Defects on Carrier Lifetime in 4H-SiC Epitaxial Layers
Maximenko, S.I. (author) / Freitas, J.A. (author) / Picard, Y.N. (author) / Klein, P.B. (author) / Myers-Ward, R.L. (author) / Lew, K.K. (author) / Muzykov, P.G. (author) / Gaskill, D.K. (author) / Eddy, C.R. (author) / Sudarshan, T.S. (author)
2010-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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