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    Nucleation of c-Axis Screw Dislocations at Substrate Surface Damage during 4H-Silicon Carbide Homo-Epitaxy

    New search for: Dudley, M.
    New search for: Zhang, N.
    New search for: Zhang, Y.
    New search for: Raghothamachar, B.
    New search for: Sanchez, E.K.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

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    Nucleation of c-Axis Screw Dislocations at Substrate Surface Damage during 4H-Silicon Carbide Homo-Epitaxy

    New search for: Dudley, M.
    New search for: Zhang, N.
    New search for: Zhang, Y.
    New search for: Raghothamachar, B.
    New search for: Sanchez, E.K.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Nucleation of c-Axis Screw Dislocations at Substrate Surface Damage during 4H-Silicon Carbide Homo-Epitaxy

    New search for: Dudley, M.
    New search for: Zhang, N.
    New search for: Zhang, Y.
    New search for: Raghothamachar, B.
    New search for: Sanchez, E.K.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Nucleation of c-Axis Screw Dislocations at Substrate Surface Damage during 4H-Silicon Carbide Homo-Epitaxy

    Contributors:

    Dudley, M. (author) / Zhang, N. (author) / Zhang, Y. (author) / Raghothamachar, B. (author) / Sanchez, E.K. (author) / Bauer, A.J. / Friedrichs, P. / Krieger, M. / Pensl, G. / Rupp, R.

    Published in:

    Silicon Carbide and Related Materials 2009 ; 295-298

    MATERIALS SCIENCE FORUM ; 645/648

    Publication date:

    2010-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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