Shallow Defects Observed in As-Grown and Electron-Irradiated or He^+-Implanted Al-Doped 4H-SiC Epilayers: Fid-Bau Portal

Shallow Defects Observed in As-Grown and Electron-Irradiated or He^+-Implanted Al-Doped 4H-SiC Epilayers

Beljakowa, S. / Reshanov, S.A. / Zippelius, B. / Krieger, M. / Pensl, G. / Danno, K. / Kimoto, T. / Onoda, S. / Ohshima, T. / Yan, F.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Shallow Defects Observed in As-Grown and Electron-Irradiated or He^+-Implanted Al-Doped 4H-SiC Epilayers

Beljakowa, S. / Reshanov, S.A. / Zippelius, B. / Krieger, M. / Pensl, G. / Danno, K. / Kimoto, T. / Onoda, S. / Ohshima, T. / Yan, F.

Shallow Defects Observed in As-Grown and Electron-Irradiated or He^+-Implanted Al-Doped 4H-SiC Epilayers

Beljakowa, S. / Reshanov, S.A. / Zippelius, B. / Krieger, M. / Pensl, G. / Danno, K. / Kimoto, T. / Onoda, S. / Ohshima, T. / Yan, F.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Shallow Defects Observed in As-Grown and Electron-Irradiated or He^+-Implanted Al-Doped 4H-SiC Epilayers

Contributors:

Beljakowa, S. (author) / Reshanov, S.A. (author) / Zippelius, B. (author) / Krieger, M. (author) / Pensl, G. (author) / Danno, K. (author) / Kimoto, T. (author) / Onoda, S. (author) / Ohshima, T. (author) / Yan, F. (author)

Published in:

Silicon Carbide and Related Materials 2009 ; 427-430

MATERIALS SCIENCE FORUM ; 645/648

Publication date:

2010-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Itoh, H. / Yoshikawa, M. / Nashiyama, I. et al. | British Library Online Contents | 1993

Vacancies in As-Grown and Electron-Irradiated 4H-SiC Epilayers Investigated by Positron Annihilation

Dannefaer, S. / Avalos, V. / Syvajarvi, M. et al. | British Library Online Contents | 2003

Peaker, A.R. / Evans-Freeman, J.H. / Kan, P.Y.Y. et al. | British Library Online Contents | 2000

Electrical Characterization of Erbium-Implanted 4H-SiC Epilayers

Reshanov, S. A. / Klettke, O. / Pensl, G. et al. | British Library Online Contents | 2003

SIMS Studies of Cl-Doped ZnSe Epilayers Grown by MBE

Gard, F. S. / Riley, J. D. / Prince, K. | British Library Online Contents | 2006