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    Improved Electrical Properties of SiC-MOS Interfaces by Thermal Oxidation of Plasma Nitrided 4H-SiC(0001) Surfaces

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    Improved Electrical Properties of SiC-MOS Interfaces by Thermal Oxidation of Plasma Nitrided 4H-SiC(0001) Surfaces

    New search for: Kagei, Y.
    New search for: Kirino, T.
    New search for: Watanabe, Y.
    New search for: Mitani, S.
    New search for: Nakano, Y.
    New search for: Nakamura, T.
    New search for: Hosoi, T.
    New search for: Shimura, T.
    New search for: Watanabe, H.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

    Access

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    Improved Electrical Properties of SiC-MOS Interfaces by Thermal Oxidation of Plasma Nitrided 4H-SiC(0001) Surfaces

    New search for: Kagei, Y.
    New search for: Kirino, T.
    New search for: Watanabe, Y.
    New search for: Mitani, S.
    New search for: Nakano, Y.
    New search for: Nakamura, T.
    New search for: Hosoi, T.
    New search for: Shimura, T.
    New search for: Watanabe, H.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

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    Document information
    Title:

    Improved Electrical Properties of SiC-MOS Interfaces by Thermal Oxidation of Plasma Nitrided 4H-SiC(0001) Surfaces

    Contributors:

    Kagei, Y. (author) / Kirino, T. (author) / Watanabe, Y. (author) / Mitani, S. (author) / Nakano, Y. (author) / Nakamura, T. (author) / Hosoi, T. (author) / Shimura, T. (author) / Watanabe, H. (author) / Bauer, A.J.

    Published in:

    Silicon Carbide and Related Materials 2009 ; 507-510

    MATERIALS SCIENCE FORUM ; 645/648

    Publication date:

    2010-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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