Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Morphology Improvement of Step Bunching on 4H-SiC Wafers by Polishing Technique

    New search for: Kato, T.
    New search for: Kinoshita, A.
    New search for: Wada, K.
    New search for: Nishi, T.
    New search for: Hozomi, E.
    New search for: Taniguchi, H.
    New search for: Fukuda, K.
    New search for: Okumura, H.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Morphology Improvement of Step Bunching on 4H-SiC Wafers by Polishing Technique

    New search for: Kato, T.
    New search for: Kinoshita, A.
    New search for: Wada, K.
    New search for: Nishi, T.
    New search for: Hozomi, E.
    New search for: Taniguchi, H.
    New search for: Fukuda, K.
    New search for: Okumura, H.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Morphology Improvement of Step Bunching on 4H-SiC Wafers by Polishing Technique

    New search for: Kato, T.
    New search for: Kinoshita, A.
    New search for: Wada, K.
    New search for: Nishi, T.
    New search for: Hozomi, E.
    New search for: Taniguchi, H.
    New search for: Fukuda, K.
    New search for: Okumura, H.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Morphology Improvement of Step Bunching on 4H-SiC Wafers by Polishing Technique

    Contributors:

    Kato, T. (author) / Kinoshita, A. (author) / Wada, K. (author) / Nishi, T. (author) / Hozomi, E. (author) / Taniguchi, H. (author) / Fukuda, K. (author) / Okumura, H. (author) / Bauer, A.J. / Friedrichs, P.

    Published in:

    Silicon Carbide and Related Materials 2009 ; 763-766

    MATERIALS SCIENCE FORUM ; 645/648

    Publication date:

    2010-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Step-Bunching Dependence of the Lifetime of MOS Capacitor on 4^o Off-Axis Si-Face 4H-SiC Epitaxial Wafers

    Bandoh, A. / Suzuki, K. / Miyasaka, Y. et al. | British Library Online Contents | 2014

    Step bunching in potassium dihydrogen phosphate crystal growth: Phenomenology

    Booth, N. A. / Chernov, A. A. / Vekilov, P. G. | British Library Online Contents | 2002

    Polishing of CVD Diamond Wafers and Films

    Feng, H.B. / Chen, Y.Q. / Zhang, L.C. | British Library Online Contents | 2013

    Polishing Silicon Wafers with the Nanodiamond Abrasive Tools Prepared by Sol-Gel Technique

    Hu, G.Q. / Lu, J. / Xu, X.P. | British Library Online Contents | 2012

    Origin of Giant Step Bunching on 4H-SiC (0001) Surfaces

    Ishida, Y. / Takahashi, T. / Okumura, H. et al. | British Library Online Contents | 2009

    Back to top