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Polishing Silicon Wafers with the Nanodiamond Abrasive Tools Prepared by Sol-Gel Technique

Hu, G.Q. / Lu, J. / Xu, X.P.

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Polishing Silicon Wafers with the Nanodiamond Abrasive Tools Prepared by Sol-Gel Technique

Hu, G.Q. / Lu, J. / Xu, X.P.

Polishing Silicon Wafers with the Nanodiamond Abrasive Tools Prepared by Sol-Gel Technique

Hu, G.Q. / Lu, J. / Xu, X.P.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Polishing Silicon Wafers with the Nanodiamond Abrasive Tools Prepared by Sol-Gel Technique

Contributors:

Hu, G.Q. (author) / Lu, J. (author) / Xu, X.P. (author) / Morgan, M.N. / Shaw, A. / Mgaloblishvili, O.

Published in:

Precision Machining VI ; 1-6

KEY ENGINEERING MATERIALS ; 496

Publication date:

2012-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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