Impact of CF~4 Plasma Treatment on the Surface Roughness of Ion Implanted SiC Induced by High Temperature Annealing: Fid-Bau Portal

Impact of CF~4 Plasma Treatment on the Surface Roughness of Ion Implanted SiC Induced by High Temperature Annealing

Sugimoto, T. / Satoh, M. / Nakamura, T. / Mashimo, K. / Doi, H. / Shibagaki, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Impact of CF~4 Plasma Treatment on the Surface Roughness of Ion Implanted SiC Induced by High Temperature Annealing

Sugimoto, T. / Satoh, M. / Nakamura, T. / Mashimo, K. / Doi, H. / Shibagaki, M.

Impact of CF~4 Plasma Treatment on the Surface Roughness of Ion Implanted SiC Induced by High Temperature Annealing

Sugimoto, T. / Satoh, M. / Nakamura, T. / Mashimo, K. / Doi, H. / Shibagaki, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Impact of CF~4 Plasma Treatment on the Surface Roughness of Ion Implanted SiC Induced by High Temperature Annealing

Contributors:

Sugimoto, T. (author) / Satoh, M. (author) / Nakamura, T. (author) / Mashimo, K. (author) / Doi, H. (author) / Shibagaki, M. (author) / Bauer, A.J. / Friedrichs, P. / Krieger, M. / Pensl, G.

Published in:

Silicon Carbide and Related Materials 2009 ; 783-786

MATERIALS SCIENCE FORUM ; 645/648

Publication date:

2010-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Alves, E. / Monteiro, T. / Soares, J. et al. | British Library Online Contents | 2001

Annealing Temperature Dependence of the Electrically Active Profiles and Surface Roughness in Multiple Al Implanted 4H-SiC

Giannazzo, F. / Roccaforte, F. / Salinas, D. et al. | British Library Online Contents | 2009

Influence of Annealing Parameters on Surface Roughness, Mobility and Contact Resistance of Aluminium Implanted 4H SiC

Schmitt, H. / Haublein, V. / Bauer, A.J. et al. | British Library Online Contents | 2011

Effect of Surface Orientation and Off-Angle on Surface Roughness and Electrical Properties of p-Type Impurity Implanted 4H-SiC Substrate after High Temperature Annealing

Kinoshita, A. / Katou, M. / Kawasaki, M. et al. | British Library Online Contents | 2006

High-temperature annealing behavior of ion-implanted spinel single crystals

Enescu, S. E. / Thome, L. / Gentils, A. et al. | British Library Online Contents | 2004