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Annealing Temperature Dependence of the Electrically Active Profiles and Surface Roughness in Multiple Al Implanted 4H-SiC
Annealing Temperature Dependence of the Electrically Active Profiles and Surface Roughness in Multiple Al Implanted 4H-SiC
Annealing Temperature Dependence of the Electrically Active Profiles and Surface Roughness in Multiple Al Implanted 4H-SiC
Giannazzo, F. (author) / Roccaforte, F. (author) / Salinas, D. (author) / Raineri, V. (author)
MATERIALS SCIENCE FORUM ; 600/603 ; 603-606
2009-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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