Effect of Surface Orientation and Off-Angle on Surface Roughness and Electrical Properties of p-Type Impurity Implanted 4H-SiC Substrate after High Temperature Annealing: Fid-Bau Portal

Effect of Surface Orientation and Off-Angle on Surface Roughness and Electrical Properties of p-Type Impurity Implanted 4H-SiC Substrate after High Temperature Annealing

Kinoshita, A. / Katou, M. / Kawasaki, M. / Kojima, K. / Fukuda, K. / Arai, K. / Morigasa, F. / Endou, T. / Isii, T. / Yashima, T.

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Effect of Surface Orientation and Off-Angle on Surface Roughness and Electrical Properties of p-Type Impurity Implanted 4H-SiC Substrate after High Temperature Annealing

Kinoshita, A. / Katou, M. / Kawasaki, M. / Kojima, K. / Fukuda, K. / Arai, K. / Morigasa, F. / Endou, T. / Isii, T. / Yashima, T.

Effect of Surface Orientation and Off-Angle on Surface Roughness and Electrical Properties of p-Type Impurity Implanted 4H-SiC Substrate after High Temperature Annealing

Kinoshita, A. / Katou, M. / Kawasaki, M. / Kojima, K. / Fukuda, K. / Arai, K. / Morigasa, F. / Endou, T. / Isii, T. / Yashima, T.

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Title:

Effect of Surface Orientation and Off-Angle on Surface Roughness and Electrical Properties of p-Type Impurity Implanted 4H-SiC Substrate after High Temperature Annealing

Contributors:

Kinoshita, A. (author) / Katou, M. (author) / Kawasaki, M. (author) / Kojima, K. (author) / Fukuda, K. (author) / Arai, K. (author) / Morigasa, F. (author) / Endou, T. (author) / Isii, T. (author) / Yashima, T. (author)

Published in:

Silicon Carbide and Related Materials - 2005 ; 835-838

MATERIALS SCIENCE FORUM ; 527/529

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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