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A platform for research: civil engineering, architecture and urbanism
Study of Deposition of Aluminum Nitride Thin Films by Hollow Cathode Electron Beam Vapor Deposition Method
Study of Deposition of Aluminum Nitride Thin Films by Hollow Cathode Electron Beam Vapor Deposition Method
Study of Deposition of Aluminum Nitride Thin Films by Hollow Cathode Electron Beam Vapor Deposition Method
Mu, Z.X. (author) / Mu, X.D. (author) / Wang, C. (author) / Dong, C. (author) / Nie, J.-F. / Morton, A.
2010-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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