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Mechanical properties of the plasma-enhanced magnetron sputtering Si-C-N coatings

Wang, Y. / Li, Z. / Du, J. / Wang, B.

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Mechanical properties of the plasma-enhanced magnetron sputtering Si-C-N coatings

Wang, Y. / Li, Z. / Du, J. / Wang, B.

Mechanical properties of the plasma-enhanced magnetron sputtering Si-C-N coatings

Wang, Y. / Li, Z. / Du, J. / Wang, B.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Mechanical properties of the plasma-enhanced magnetron sputtering Si-C-N coatings

Contributors:

Wang, Y. (author) / Li, Z. (author) / Du, J. (author) / Wang, B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 1-5

Publication date:

2010-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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