A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Electrostatic Control and the Need of Feedback Control Ionization in Critical Environment of MEMS Manufacturing Process
Electrostatic Control and the Need of Feedback Control Ionization in Critical Environment of MEMS Manufacturing Process
Electrostatic Control and the Need of Feedback Control Ionization in Critical Environment of MEMS Manufacturing Process
Chakkaew, A. (author) / Titiroongruang, W. (author) / Zhao, J. / Kunieda, M. / Yang, G. / Yuan, X.-M.
2010-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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