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Effect of Substrate Temperature on the Properties of Al-Doped ZnO Films by RF Magnetron Sputtering
Effect of Substrate Temperature on the Properties of Al-Doped ZnO Films by RF Magnetron Sputtering
Effect of Substrate Temperature on the Properties of Al-Doped ZnO Films by RF Magnetron Sputtering
Wu, Y.B. (author) / Lei, S. (author) / Wang, Z. (author) / Zhao, R.H. (author) / Huang, L. (author) / Li, H. (author) / Huang, Y.M.
2011-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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